Nanomagnetic Thinfilms for Advanced Inductors and EMI Shields in Smart Systems

Abstract

Nanomagnetics provide unique opportunities to address the fundamental limitations of traditional electronic materials for miniaturization of RF and power components, while simultaneously enhancing their performance. This paper demonstrates nanomagnetic films and processes for power inductors and EMI shield applications. A DC-RF co-sputtering process was developed to synthesize cobalt-based nanogranular films with superior properties compared to microscale magnetic materials. The benefits of this material for miniaturized power inductors are demonstrated with analytical models. The second part of the paper demonstrates miniaturization of electromagnetic interference (EMI) shields with nanomagnetic film-stacks.